The Supermag® SCM Maglev Wafer Rotation System is designed for wafer support and rotation in semiconductor equipment. Utilizing advanced magnetic levitation bearing and motor integrated control technology, it surpasses long-standing foreign technological monopolies, with several parameters exceeding international standards. The rotor levitates and rotates without friction, dynamic seals, or particle generation, making it ideal for high-end chip manufacturing processes. These processes include oxidation, diffusion and annealing, rapid thermal processing (RTP), rapid thermal annealing (RTA), rapid thermal oxidation (RTO), rapid thermal nitridation (RTN), atomic layer deposition (ALD), chemical vapor deposition (CVD), single-wafer cleaning, metal-organic chemical vapor deposition (MOCVD), etching, spin coating, and more.